Welcome to Mepanet, where you can get answers from engineering experts.

What are the HEPA and ULPA filters?

0 votes
191 views asked Apr 11, 2015 by Joe Mahini

1 Answer

0 votes
The supply of air to cleanroom must be filtered to ensure the removal of particles that would contaminate the process being carried out in that room. Air can be filtered with High Efficiency Particulate Air (HEPA) filters, which are one of the most efficient air filters. The more efficient filter is Ultra Low Penetration Air (ULPA) filters which are using for production of integrated circuits.

In cleanrooms, high efficiency filters are used for dual purpose of removing small particles and, in unidirectional flow cleanrooms, straightening the air flow. The arrangement and spacing of high efficiency filters, as well as the velocity of air, affects both the concentration of airborne particles and the formation of turbulent zones and pathways in which particle can accumulate and migrate through the cleanrooms. The combination of a high efficiency filter and a fan only initiates the unidirectional flow process. A balance of the entire airflow path required to ensure good unidirectional flow.

Different arrangements and type of HEPA and ULPA filters are required to provide cleanrooms for different industries.
answered Apr 11, 2015 by Joe Mahini

Please log in or register to answer this question.