A room in which the concentration of airborne particles is controlled, and which is constructed and used in a manner to minimize the introduction, generation, and retention of particles inside the room and in which other relevant parameters, e.g. temperature, humidity, and pressure, are controlled as necessary (ISO 14644-1).
Classification of cleanrooms:
Cleanroom are classified by the cleanliness of their air. The method most understood and universally applied is the one suggested in versions of Federal Standard 209 in which the number of particles equal to and greater than 0.5 µm is measured in one cubic foot of air and this count is used to classify the room.
A classification of cleanrooms is given in a simplified form in below table:
|
Class
|
1
|
10
|
100
|
1,000
|
10,000
|
100,000
|
|
Number of particles/cu. Ft ≥ 0.5 µm
|
1
|
10
|
100
|
1,000
|
10,000
|
100,000
|
